Title:
真空作成装置
Document Type and Number:
Japanese Patent JP7008976
Kind Code:
B2
Abstract:
To provide a vacuum creation device that can be used in combination with an ion pump and a getter pump even when the device is compact.SOLUTION: A vacuum creation device includes a cylindrical casing 1, a heater mounting portion 5 for mounting a heater for heating the cylindrical casing from the outside of the cylindrical portion of the cylindrical casing 1, and a getter element 9 in contact with the inner wall of the cylindrical casing 1, to which heat from the heater is transmitted, and the heater can be replaced with a multistage magnet, and after the primary degassing by an ion pump using the multistage magnet, secondary degassing as a getter pump can be performed using the heater.SELECTED DRAWING: Figure 1
Inventors:
Hideyoshi Tanaka
Application Number:
JP2017218434A
Publication Date:
January 25, 2022
Filing Date:
November 13, 2017
Export Citation:
Assignee:
National Institute of Information and Communications Technology
International Classes:
H01J41/20; F04B37/02
Domestic Patent References:
| JP3222876A | ||||
| JP2011517836A |
Foreign References:
| WO2008099610A1 | ||||
| WO2014132758A1 |
Attorney, Agent or Firm:
Hiroyuki Hirose
Daisuke Seki
Daisuke Seki