Title:
真空測定装置
Document Type and Number:
Japanese Patent JP5816116
Kind Code:
B2
Inventors:
Kuniaki Miura
Nobu Asaba
Chiaki Yamamura
Nobu Asaba
Chiaki Yamamura
Application Number:
JP2012070484A
Publication Date:
November 18, 2015
Filing Date:
March 27, 2012
Export Citation:
Assignee:
Sukegawa Electric Co., Ltd.
International Classes:
G01L19/00; G01L19/06; G01L21/00
Domestic Patent References:
| JP6241233Y2 | ||||
| JP10153510A | ||||
| JP4877320B2 |
Attorney, Agent or Firm:
Kazuyoshi Hojo