To carry out high-accuracy vacuum measurements by miniaturizing a vacuum measuring device.

In a vacuum measuring element 10, a cold cathode 20 serving as the radiation source of electrons that ionize atoms of residual gas and a collector electrode 26 collecting positive ions of the ionized residual gas are formed on a flat substrate 40 in a spaced, opposite relation to each other. In this case, the cold cathode 20 has its end sharply pointed toward the collector electrode 26, and a gate electrode 22 in which a gap through which the electrons radiated from the cold cathode pass is provided in front of the end of the cold cathode is formed in a position between the cold cathode and the collector electrode and close to the cold cathode. An anode electrode 24 in which a gap through which the electrons pass is provided in a part corresponding to the above gap is formed in a position between the gate electrode and the collector electrode and close to the gate electrode, and a space in which atoms of the residual gas are ionized by the electrons radiated from the cold cathode is formed between the anode electrode and the collector electrode.