Title:
VACUUM METER FOR ULTRA-HIGH VACUUM
Document Type and Number:
Japanese Patent JP2863652
Kind Code:
B2
Abstract:
PURPOSE: To enable an ultra-high vacuum region which is equal to or less than 10-10 Pa to be measured accurately by measuring only gas molecule ions by virtually eliminating an influence of electron excitation isolated ion, light, and soft X rays which constitutes factors of measurement limitation at a low- pressure side of an ionization vacuum meter.
CONSTITUTION: A title item is provided with an energy analysis part 5 which eliminates one part of an electron excitation isolated ion and light and soft X rays which virtually affect a pressure measurement which is generated accompanied by electron impact for ionizing an gas molecule and a pulse electron beam source 2 which utilizes a flight time difference among the ion of the gas molecule, light, and soft X rays by changing an electron which is used for electron impact to pulses for eliminating influence of remaining light and soft X rays which enter an ion detector 11 through the energy analysis part 5.
Inventors:
ARAKAWA ICHIRO
TAKEUCHI KYOKO
TSUJI YASUSHI
TAKEUCHI KYOKO
TSUJI YASUSHI
Application Number:
JP19445891A
Publication Date:
March 03, 1999
Filing Date:
August 02, 1991
Export Citation:
Assignee:
NIPPON SHINKU GIJUTSU KK
International Classes:
G01L21/30; (IPC1-7): G01L21/30
Domestic Patent References:
| JP518842A | ||||
| JP4817389A | ||||
| JP5113675B2 | ||||
| JP5113434B1 |
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)