Title:
真空計
Document Type and Number:
Japanese Patent JP5038361
Kind Code:
B2
Abstract:
A vacuum ionization gauge ( 30 ) includes a cathode ( 31 ), an anode ring ( 33 ), a shield electrode ( 32 ), an ion educed electrode ( 34 ), a reflector ( 35 ) and a collector ( 36 ). The cathode is positioned corresponding to a first opening of the shield electrode, and the ion educed electrode is positioned corresponding to an opposite second opening of the shield electrode. An ion educed hole ( 341 ) is defined in a middle of the ion educed electrode. The reflector has a curving surface generally surrounding the second opening of the shield electrode. The collector is positioned at a center of the curving surface of the reflector and points toward the ion educed hole. The anode ring is positioned in the middle of the shield electrode. The vacuum ionization gauge is small volume and has low power consumption and improved sensitivity.
Inventors:
Willow Peng
Wei Yo
Sheng Raimei
Liu Ryo
Akira Hu
Guo Sairin
Chen Ying
Han Moriyoshi
Wei Yo
Sheng Raimei
Liu Ryo
Akira Hu
Guo Sairin
Chen Ying
Han Moriyoshi
Application Number:
JP2009147814A
Publication Date:
October 03, 2012
Filing Date:
June 22, 2009
Export Citation:
Assignee:
HONG FU JIN PRECISION INDUSTRY(SHENZHEN)CO.,LTD.
Tsinghwa University
Tsinghwa University
International Classes:
G01L21/32
Domestic Patent References:
| JP59058751A | ||||
| JP3135746A | ||||
| JP2000039375A | ||||
| JP11307040A | ||||
| JP2000315474A | ||||
| JP2006047288A |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro