PURPOSE: To measure atmosphere pressure over a wide range with good accuracy, by providing a means for exciting a plate shaped vibrator and a means for detecting displacement due to the vibration of an exciting body.
CONSTITUTION: A torsion bar 1 and a vibrator 2 are integrally formed along with a support member 3 comprising a single silicon monocrystal and the support member 3 is fixed to a substrate 4 comprising a single silicon monocrystal. Now, when exciting voltage is applied between the vibrator 2 and an exciting electrode 5 by an exciting circuit 8, the vibrator 2 is vibrated. When the vibrator 2 is vibrated, the distance between the vibrator 2 and a detection electrode 6 changes and, therefore, the electrostatic capacity between both of them changes. Then, if the change in the electrostatic capacity between the vibrator 2 and the detection electrode is detected by a detection circuit 9, the angle of inclination of the vibrator 2 can be detected and, by this method, atmosphere pressure can be measured, the change in a detected value with the elapse of time is not generated and atmospheric pressure can be measured accurately over a wide range.
KAWAMURA YOSHIO
TERASAWA TSUNEO
TANAKA SHINJI
KONDO YATARO
MORIYAMA SHIGEO
JPS59141026A | 1984-08-13 | |||
JPS5957129A | 1984-04-02 | |||
JPS57160067A | 1982-10-02 | |||
JPS5856820A | 1983-04-04 |