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Title:
VACUUM METER
Document Type and Number:
Japanese Patent JPS61231423
Kind Code:
A
Abstract:

PURPOSE: To measure atmosphere pressure over a wide range with good accuracy, by providing a means for exciting a plate shaped vibrator and a means for detecting displacement due to the vibration of an exciting body.

CONSTITUTION: A torsion bar 1 and a vibrator 2 are integrally formed along with a support member 3 comprising a single silicon monocrystal and the support member 3 is fixed to a substrate 4 comprising a single silicon monocrystal. Now, when exciting voltage is applied between the vibrator 2 and an exciting electrode 5 by an exciting circuit 8, the vibrator 2 is vibrated. When the vibrator 2 is vibrated, the distance between the vibrator 2 and a detection electrode 6 changes and, therefore, the electrostatic capacity between both of them changes. Then, if the change in the electrostatic capacity between the vibrator 2 and the detection electrode is detected by a detection circuit 9, the angle of inclination of the vibrator 2 can be detected and, by this method, atmosphere pressure can be measured, the change in a detected value with the elapse of time is not generated and atmospheric pressure can be measured accurately over a wide range.


Inventors:
SATO KAZUO
KAWAMURA YOSHIO
TERASAWA TSUNEO
TANAKA SHINJI
KONDO YATARO
MORIYAMA SHIGEO
Application Number:
JP7268785A
Publication Date:
October 15, 1986
Filing Date:
April 08, 1985
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01L9/00; G01L21/16; (IPC1-7): G01L9/00; G01L21/16
Domestic Patent References:
JPS59141026A1984-08-13
JPS5957129A1984-04-02
JPS57160067A1982-10-02
JPS5856820A1983-04-04
Attorney, Agent or Firm:
Junnosuke Nakamura



 
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