Title:
【発明の名称】真空マイクロデバイス
Document Type and Number:
Japanese Patent JP3079994
Kind Code:
B2
Abstract:
A vacuum microdevice having a field-emission cold cathode includes a first electrode having a projection portion formed on its surface, the projection having a sharp tip, an insulating film formed in the region of the first electrode, excluding the sharp tip of the projection portion, a second electrode formed in a region on the insulating film, excluding the sharp tip of the projection portion, to planarize the surface of the second electrode, and a structural substrate bonded to the lower surface of the first electrode and having a recess portion in the bonding surface with the lower surface of the first electrode, the recess portion having a size large enough to cover a recess reflecting the sharp tip of the projection portion formed on the lower surface of the first electrode. The interior of the recess portion formed in the structural substrate communicates with the atmosphere outside the device. A support structure is formed on the surface of the second electrode to surround each projection portion formed on the first electrode. With this structure, a vacuum microdevice which can suppress variations in characteristics due to voids, and exhibit excellent long-term reliability can be provided.
More Like This:
| JPH11260273 | FIELD EMISSION-TYPE COLD-CATHODE ELEMENT |
| JPH01149349 | ELECTRON EMITTING ELEMENT |
| WO/1998/025287 | ELECTRON SOURCE AND METHOD FOR MAKING THE SAME |
Inventors:
Kenichiro Suzuki
Application Number:
JP7190596A
Publication Date:
August 21, 2000
Filing Date:
March 27, 1996
Export Citation:
Assignee:
NEC
International Classes:
H01J1/304; B81B1/00; H01J3/02; (IPC1-7): H01J1/30
Domestic Patent References:
| JP6111713A | ||||
| JP7254355A | ||||
| JP5205614A | ||||
| JP7326603A | ||||
| JP6310029A | ||||
| JP5266832A | ||||
| JP8102246A | ||||
| JP412434A | ||||
| JP4274123A |
Attorney, Agent or Firm:
Suzuki Akio