Title:
VACUUM MONITOR
Document Type and Number:
Japanese Patent JPS60195826
Kind Code:
A
Inventors:
MORIMIYA OSAMU
SUZUKI SETSUO
SUZUKI SETSUO
Application Number:
JP5110684A
Publication Date:
October 04, 1985
Filing Date:
March 19, 1984
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
H01H33/66; G01L21/00; (IPC1-7): G01L21/00; H01H33/66
Attorney, Agent or Firm:
Noriyuki Noriyuki