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Patent Searching and Data


Title:
VACUUM PRESSURE MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPH08180776
Kind Code:
A
Abstract:

PURPOSE: To provide a vacuum pressure measuring apparatus in which the intensity of a magnetic field can be adjusted easily and of which a connection part to fix a plurality of coil parts is hardly broken by thermal expansion and contaction.

CONSTITUTION: A vacuum pressure measuring apparatus is composed of at least a d.c. voltage circuit 2 to make electric current run in and apply d.c. voltage to a pair of electrodes 6A, 6B installed in a vacuum container 5 and an exitation d.c. circuit 3 to make d.c. current run in a solenoid coil 8 installed in the outer circumference of the vacuum container to generate a magnetic field H in order to amplify the ion current (i). A first conductor piece 10A in the inner-most layer and a second conductor piece 10B in the outer most layer of a coil part 20 composed of a plurality of layers connected in series are so set as to face to the inside and the outside, respectively, and a connection part 10 which fixes respective coil parts 20 between the conductor pieces by a fixing means is so installed in the middle layer of the inner- and outer most layers as to make both conductor pieces 10A, 10B overlapped each other and thus a solenoid coil is composed.


Inventors:
YAMAMURA YOSHIO
KURODA KATSUZO
KOGUCHI YOSHIO
Application Number:
JP31975394A
Publication Date:
July 12, 1996
Filing Date:
December 22, 1994
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01L21/30; H01H33/66; (IPC1-7): H01H33/66; G01L21/30
Attorney, Agent or Firm:
Ogawa Katsuo