To provide a vacuum pressure measuring method and device for accurately and simply measuring vacuum pressure at a reduced pressure part.
Water in a container 3 being connected to a reduced pressure part 1 where pressure should be measured is heated up to saturation temperature, and the pressure of the reduced pressure part 1 is calculated, based on a detection temperature on heating. Also, the upper part of the container 3 is connected to the reduced pressure part 1 via an upper connecting pipe 4, at the same time, a site for prescribing a specific water level in the container 3 is connected to the reduced pressure part 1 via a lower connecting pipe 5, a means for heating the water in the container 3 and a temperature sensor 9 for detecting the temperature of heated water are provided, and a means for calculating the pressure of the reduced pressure part 1 based on the detection value of the temperature sensor 9 is provided.
ABE HAJIME
FUJIWARA HIROAKI
| JPH1019706A | 1998-01-23 | |||
| JPS5530883U | 1980-02-28 |