Title:
真空処理装置、処理対象物の処理方法、及び成膜装置
Document Type and Number:
Japanese Patent JP5409903
Kind Code:
B2
Inventors:
Takahisa Yamazaki
Takahiro Nakayama
Masaaki Hirakawa
Tsuyoshi Kagami
Kazumasa Tojo
Takahiro Nakayama
Masaaki Hirakawa
Tsuyoshi Kagami
Kazumasa Tojo
Application Number:
JP2012515866A
Publication Date:
February 05, 2014
Filing Date:
May 13, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/683; G11B5/84; G11B7/26; H01L21/31; H01L21/768
Domestic Patent References:
| JP2005063986A | 2005-03-10 | |||
| JP2002043299A | 2002-02-08 | |||
| JP2004119523A | 2004-04-15 | |||
| JP2009094503A | 2009-04-30 | |||
| JP2005063986A | 2005-03-10 | |||
| JP2008004628A | 2008-01-10 | |||
| JP2006165573A | 2006-06-22 |
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka
Muranaka