Title:
真空処理装置
Document Type and Number:
Japanese Patent JP5750338
Kind Code:
B2
Inventors:
Ichiro Mukai
Youichi Hirose
Youichi Hirose
Application Number:
JP2011177750A
Publication Date:
July 22, 2015
Filing Date:
August 15, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F27D1/18; B22D23/00; F27B14/04
Domestic Patent References:
| JP54083040U | ||||
| JP63123996U | ||||
| JP2009229020A | ||||
| JP2010223554A | ||||
| JP57125762U | ||||
| JP50020228U |
Attorney, Agent or Firm:
Seiryu Corporation