Title:
真空処理装置
Document Type and Number:
Japanese Patent JP5892828
Kind Code:
B2
Inventors:
Ryoichi Isomura
Application Number:
JP2012072919A
Publication Date:
March 23, 2016
Filing Date:
March 28, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/677
Domestic Patent References:
| JP2010147250A | ||||
| JP2011181750A | ||||
| JP2008147616A | ||||
| JP2011091334A | ||||
| JP2003060005A | ||||
| JP2003059999A |
Foreign References:
| US20080152463 |
Attorney, Agent or Firm:
Patent Business Corporation Daiichi International Patent Office