Title:
VACUUM PROCESSOR
Document Type and Number:
Japanese Patent JP3266567
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To stably operate the surface processing of a substrate to be processed, by preventing glow discharging due to inert gas generated between a susceptor and a vacuum processing container.
SOLUTION: A bush made of porous ceramic is arranged between a susceptor and a vacuum processing container in the middle of an inert gas supplying path, and a guide bush 11 for guiding an elevation pin for carrying a substrate to be processed is constituted as the inside and outside double structure constituted of an insulator bush 11a for supporting the inside elevation pin and an outside porous ceramic 11b. The distance of a channel between the susceptor of the inert gas and the vacuum processing container is made long so that the glow discharging of the inert gas can be prevented. The guide bush 11 can be constituted so that a spiral groove constituted of an insulator can be formed with a hole for supporting the elevation pin at the central part, and with an inert gas channel at the outside part.
Inventors:
Shozo Watanabe
Hideo Haraguchi
Shoji Fukui
Izuru Matsuda
Hideo Haraguchi
Shoji Fukui
Izuru Matsuda
Application Number:
JP13560998A
Publication Date:
March 18, 2002
Filing Date:
May 18, 1998
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H05H1/46; C23C14/00; C23C16/44; C23C16/50; H01L21/02; H01L21/203; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H01L21/205; C23C14/00; C23C16/44; C23C16/50; H01L21/203; H01L21/3065; H05H1/46
Domestic Patent References:
| JP61278144A | ||||
| JP794496A | ||||
| JP8167593A | ||||
| JP10237653A | ||||
| JP7201956A | ||||
| JP7321184A |
Attorney, Agent or Firm:
Masaru Ishihara