Title:
Vacuum processing equipment
Document Type and Number:
Japanese Patent JP6322508
Kind Code:
B2
Inventors:
Yoshiji Fujii
Koji Minakata
Masaki Ito
Katsunori Fujii
Koji Minakata
Masaki Ito
Katsunori Fujii
Application Number:
JP2014148442A
Publication Date:
May 09, 2018
Filing Date:
July 22, 2014
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/683; C23C14/00
Domestic Patent References:
| JP2005333091A | ||||
| JP2006216583A | ||||
| JP11260810A | ||||
| JP9153531A | ||||
| JP2007208054A | ||||
| JP2010153678A |
Foreign References:
| CN103472603A |
Attorney, Agent or Firm:
Seiryu Corporation