Title:
VACUUM PUMP ACTIVATION CONTROLLER
Document Type and Number:
Japanese Patent JP2019044746
Kind Code:
A
Abstract:
To provide a vacuum pump activation controller capable of appropriately performing activation operation where a back pump is connected.SOLUTION: An activation controller 3 is used in an exhaust system 1, wherein the exhaust system comprises a turbomolecular pump 1 and a back pump 2 connected to a back pressure side of the turbomolecular pump 1; and is configured to control activation/deactivation of the turbomolecular pump 1. The activation controller comprises a control arithmetic unit 30 configured to set activation timing of the turbomolecular pump 1, based on information on suction port pressure after activation of the back pump in a vacuum chamber 4 where air exhaustion is performed by the turbomolecular pump 1. The activation controller is configured to activate the turbomolecular pump 1 at the activation timing set by the control arithmetic unit 30.SELECTED DRAWING: Figure 1
Inventors:
KOGAME MASATO
SAKAI HARUHIKO
SAKAI HARUHIKO
Application Number:
JP2017171871A
Publication Date:
March 22, 2019
Filing Date:
September 07, 2017
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04B49/02; F04D19/04
Domestic Patent References:
| JP2007071200A | 2007-03-22 | |||
| JP2012127316A | 2012-07-05 | |||
| JP2008510093A | 2008-04-03 | |||
| JP2004339954A | 2004-12-02 | |||
| JP2001254682A | 2001-09-21 |
Attorney, Agent or Firm:
Fuyuki Nagai