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Title:
VACUUM PUMP APPARATUS
Document Type and Number:
Japanese Patent JP2013209959
Kind Code:
A
Abstract:

To provide a low-cost dry vacuum pump that can prevent separation of products in the vacuum pump to achieve smooth pump operation.

A vacuum pump apparatus includes a gas discharge pump 30 for exhausting gas; a motor 32 for driving the pump 30; and a heat transfer device 36 for transferring heat generated in the motor to the pump.


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Inventors:
YOSHIDA SHINYA
Application Number:
JP2012081657A
Publication Date:
October 10, 2013
Filing Date:
March 30, 2012
Export Citation:
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Assignee:
EBARA CORP
International Classes:
F04C29/04; F04C23/00; F04C25/02
Domestic Patent References:
JP2007278192A2007-10-25
JP2013079602A2013-05-02
JPH0557397U1993-07-30
JPH0893687A1996-04-09
JP2005120955A2005-05-12
JP2005036814A2005-02-10
JP2007278192A2007-10-25
JPH0557397U1993-07-30
JP2013079602A2013-05-02
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yamazaki Kosaku
Yukio Kanegae
Koichi Kushida



 
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