Title:
真空ポンプ装置
Document Type and Number:
Japanese Patent JP6430718
Kind Code:
B2
Inventors:
Hiroyasu Kawashima
Atsushi Shiokawa
Atsushi Shiokawa
Application Number:
JP2014098560A
Publication Date:
November 28, 2018
Filing Date:
May 12, 2014
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04C27/00; F04C23/00; F04C25/02
Domestic Patent References:
| JP2002349462A | ||||
| JP8504915A | ||||
| JP201462488A | ||||
| JP2009255244A | ||||
| JP2008534877A | ||||
| JP49104057A | ||||
| JP389080A | ||||
| JP2012246979A | ||||
| JP63285279A | ||||
| JP2004263627A | ||||
| JP2008196312A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa