Title:
真空ポンプコントローラおよび真空ポンプ
Document Type and Number:
Japanese Patent JP7361630
Kind Code:
B2
Abstract:
To obtain a vacuum pump controller which excellently operates a vacuum pump in a specific rotational frequency range, and a vacuum pump. A signal processing portion generates a current command value based on sensor signals obtained from displacement sensors which detect a displacement of a rotor shaft of the vacuum pump. A drive circuit passes a current corresponding to the current command value through each of electromagnets which adjust the displacement of the rotor shaft of the vacuum pump. In the case where a rotational frequency of the rotor shaft is in the specific rotational frequency range, a displacement limitation portion adjusts the current command value so as to limit the displacement of the rotor shaft to a displacement caused by whirling about the center of inertia.
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Inventors:
Katsuhisa Yokotsuka
Masayuki Yamamoto
Masayuki Yamamoto
Application Number:
JP2020026896A
Publication Date:
October 16, 2023
Filing Date:
February 20, 2020
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F16C32/04
Domestic Patent References:
| JP2001027238A | ||||
| JP4116014U |
Attorney, Agent or Firm:
Osamu Aoki