Title:
真空ポンプ装置
Document Type and Number:
Japanese Patent JP2007514096
Kind Code:
A
Abstract:
A regenerative pumping mechanism comprises a rotor having a series of blades positioned in an annular array on one side of the rotor, and a stator having an annular channel within which the blades rotate. In order to control the axial clearance between the rotor and the stator, an axial magnetic bearing actively controls relative axial movement between the rotor and the stator. This can allow the pumping mechanism to provide controllable axial sealing between the rotor and the stator, as opposed to radial sealing.
Inventors:
Shofield Nigel Paul
Application Number:
JP2006543629A
Publication Date:
May 31, 2007
Filing Date:
December 08, 2004
Export Citation:
Assignee:
The BOC Group plc
International Classes:
F04D19/04; F04D23/00; F04D29/04; F04D29/048; F04D29/058; F04D29/08; F16C32/04
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato