Title:
VACUUM PUMP DEVICE
Document Type and Number:
Japanese Patent JP2015214934
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum pump device including shaft seal parts that can improve shaft seal performance while having a simple structure with no need for high machining accuracy.SOLUTION: A vacuum pump device according to the present invention comprises: a pair of pump rotors 11e; a pair of rotating shafts 12 to which the pair of pump rotors 11e are attached respectively; bearings that rotatably support the pair of rotating shafts 12; and shaft seal parts arranged between the pump rotors 11e and the bearings. The shaft seal parts comprise: block members 81 including inner peripheral surfaces opposed to outer peripheral surfaces of the rotating shafts 12; annular grooves 83 opposed to the inner peripheral surfaces of the block members 81 and provided in the outer peripheral surfaces of the rotating shafts; and purge gas flow passages 81a provided in the block members to introduce purge gas. The annular grooves 83 are connected to the purge gas flow passages 81a.
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Inventors:
KAWASHIMA HIROYASU
SHIOKAWA ATSUSHI
SHIOKAWA ATSUSHI
Application Number:
JP2014098560A
Publication Date:
December 03, 2015
Filing Date:
May 12, 2014
Export Citation:
Assignee:
EBARA CORP
International Classes:
F04C27/00; F04C23/00; F04C25/02
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Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa