Title:
VACUUM PUMP AND FIXING COMPONENT, EXHAUST PORT, AND CONTROL MEANS USED IN THE SAME
Document Type and Number:
Japanese Patent JP2019120249
Kind Code:
A
Abstract:
To provide a vacuum pump which is preferable for removing product materials deposited on a passage in the vacuum pump, and to provide a fixing component, an exhaust port, and control means used in the vacuum pump.SOLUTION: A vacuum pump P1 includes: a passage R of a gas flowing from an intake port 2 to an exhaust port 3; and removing means RM which removes product materials deposited on an inner wall surface of the passage R. The removing means RM includes jet holes 91, 92, 93, each of which opens on the inner wall surface of the passage R at one end and has a structure that jets a purging gas from the jet holes 91, 92, 93 into the passage R.SELECTED DRAWING: Figure 1
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Inventors:
YAMAMOTO KAZUSHI
NONAKA MANABU
SAKAGUCHI YUKO
KABASAWA TSUYOSHI
NONAKA MANABU
SAKAGUCHI YUKO
KABASAWA TSUYOSHI
Application Number:
JP2018238342A
Publication Date:
July 22, 2019
Filing Date:
December 20, 2018
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04; F04D29/70
Domestic Patent References:
| JP2007270742A | 2007-10-18 | |||
| JPH01216082A | 1989-08-30 | |||
| JP2005325792A | 2005-11-24 |
Foreign References:
| US6224326B1 | 2001-05-01 |
Attorney, Agent or Firm:
Shigenori Wada
Motoya Suda
Motoya Suda