Title:
VACUUM PUMP, VACUUM PUMP INSPECTION DEVICE, AND VACUUM PUMP INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2019190303
Kind Code:
A
Abstract:
To provide a vacuum pump capable of automatically performing inspection of a rotating direction without additionally using an exclusive rotating direction sensor even in a state of low speed rotation.SOLUTION: A rotor shaft 21 can take at least a first state in which the rotor shaft 21 rotates at a relatively high speed, and a second state in which it rotates at a relatively low speed while deflecting and revolving within a range of a clearance H with respect to a protective bearing 36. Output information of a radial direction displacement sensor is acquired, a rotating direction of the rotor shaft 21 based on the output information of the radial direction displacement sensor is determined in the second state, whether the rotating direction is normal or not is determined, and the effect is reported and output in a case when the rotating direction is not normal.SELECTED DRAWING: Figure 9
Inventors:
FUKAMI HIDEO
Application Number:
JP2018081112A
Publication Date:
October 31, 2019
Filing Date:
April 20, 2018
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04
Domestic Patent References:
| JP2013185578A | 2013-09-19 | |||
| JPH01116318A | 1989-05-09 | |||
| JP2012193705A | 2012-10-11 |
Attorney, Agent or Firm:
Koji Mizuno
Ryo Matsushita
Keita Noguchi
Ryo Matsushita
Keita Noguchi