Title:
VACUUM PUMP AND LEAK DETECTOR
Document Type and Number:
Japanese Patent JP2022185262
Kind Code:
A
Abstract:
To prevent gas accumulation from occurring between a casing and a component fixed to the casing in a vacuum pump, and thereby prevent a slow leak from occurring.SOLUTION: A vacuum pump 100 or 100a comprises a rotor 20 capable of rotating in a predetermined rotation direction, a casing 11 housing the rotor 20, and a fixed component 30 or 40 arranged so as to be opposed to an inner wall of the casing 11. A gap S1 or S1a is formed between the inner wall of the casing 11 and the fixed component 30 or 40. A groove 111a, 111b, 311, or 411 for causing the gap S1 or S1a and an exhaust path inside the casing 11 to communicate with each other is formed in the inner wall of the casing 11 or the fixed component 30 or 40.SELECTED DRAWING: Figure 2
Inventors:
NISHIMURA TAIKI
Application Number:
JP2021092813A
Publication Date:
December 14, 2022
Filing Date:
June 02, 2021
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04
Attorney, Agent or Firm:
Yamashita
Yasuhiro Kawabun
Yasuhiro Kawabun