Title:
VACUUM PUMP AND MASS SPECTROMETER
Document Type and Number:
Japanese Patent JP2016219247
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve the exhaust performance of a vacuum pump having a plurality of inlet ports.SOLUTION: A vacuum pump 1 comprises: a first inlet port provided on the upstream side of a first turbo molecular pump stage; and a second inlet port provided on the downstream side of the first turbo molecular pump stage and communicating with a Holweck pump stage. In a first screw stator 60 of the Holweck pump stage, a through hole 60a connecting between the second inlet port and one or more screw grooves is formed from an outer peripheral surface of the first screw stator 60 to an inner peripheral surface. A communication groove 603 connecting between adjacent screws is provided between screw grooves 601c-601e to which the through hole 60a penetrates and screw grooves 601a, 601b, 601f-601h to which the through hole 60a does not penetrate.SELECTED DRAWING: Figure 4
Inventors:
MANABE MASATSUGU
Application Number:
JP2015102902A
Publication Date:
December 22, 2016
Filing Date:
May 20, 2015
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
H01J37/18; H01J49/26
Attorney, Agent or Firm:
Fuyuki Nagai