Title:
VACUUM PUMP AND METHOD FOR OPERATING VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019163764
Kind Code:
A
Abstract:
To reduce vibration, in particular, vibration of a rotor of a vacuum pump described at the beginning.SOLUTION: This invention relates to a vacuum pumps, in particular, a turbomolecular pump, and it has a housing and a rotor rotatably supported in the housing. The rotor can be driven to carry out a rotation to carry process gas from an inlet to an outlet of a vacuum pump, at that time, the rotor is rotatably supported by roller bearings (260, 273, 275) on at least one side in the housing. Here, the strength and/or buffering action of the roller bearings (260, 273, 275) can be changed.SELECTED DRAWING: Figure 1
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Inventors:
ADRIAN WIRTH
DANIEL SIEBEN
DANIEL SIEBEN
Application Number:
JP2019029323A
Publication Date:
September 26, 2019
Filing Date:
February 21, 2019
Export Citation:
Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F04D19/04
Domestic Patent References:
JPH03213695A | 1991-09-19 | |||
JPH07135345A | 1995-05-23 | |||
JPH01294995A | 1989-11-28 |
Foreign References:
EP3043074A1 | 2016-07-13 | |||
DE102007052479A1 | 2009-05-07 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura