Title:
真空ポンプシステムの圧送方法および真空ポンプシステム
Document Type and Number:
Japanese Patent JP6608394
Kind Code:
B2
Abstract:
A pumping method in a pumping system comprises: a main vacuum pump with a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the pumping system, a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and an auxiliary vacuum pump connected in parallel to the non-return valve. The main vacuum pump is activated in order to pump the gases contained in the vacuum chamber through the gas outlet port, simultaneously the auxiliary vacuum pump is activated and continues to operate all the while that the main vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main vacuum pump maintains a defined pressure in the vacuum chamber. Also included is a pumping system.
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Inventors:
Muller, didier
Ralcher, Jean-Eric
Ilchev, Theodore
Ralcher, Jean-Eric
Ilchev, Theodore
Application Number:
JP2016574254A
Publication Date:
November 20, 2019
Filing Date:
June 27, 2014
Export Citation:
Assignee:
Atelier Busch SA
International Classes:
F04C25/02; F04B41/06; F04C23/00; F04C28/06; F04C29/12
Domestic Patent References:
| JP63104693U | ||||
| JP777184A | ||||
| JP2003193988A | ||||
| JP2002339864A | ||||
| JP2003129957A | ||||
| JP2009228596A | ||||
| JP2010127156A | ||||
| JP436091A | ||||
| JP776553B2 |
Foreign References:
| US20030068233 | ||||
| DE3842886A1 |
Attorney, Agent or Firm:
Heiwa International Patent Office
Toshi Inoguchi
Toshi Inoguchi