Title:
真空ポンプユニット
Document Type and Number:
Japanese Patent JP5009634
Kind Code:
B2
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Inventors:
Hozumi Takashi
Nobuto Miyashita
Takanori Inada
Kozo Matake
Yoshinori Kojima
Shin Miyake
Katsuaki Usui
Nobuto Miyashita
Takanori Inada
Kozo Matake
Yoshinori Kojima
Shin Miyake
Katsuaki Usui
Application Number:
JP2007017643A
Publication Date:
August 22, 2012
Filing Date:
January 29, 2007
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04C25/02; F04C18/16; F04C23/00
Domestic Patent References:
| JP9324780A | ||||
| JP10184576A | ||||
| JP2003129978A | ||||
| JP5240181A | ||||
| JP2000329084A | ||||
| JP7305689A | ||||
| JP7217580A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tetsuya Hirosawa
Shintaro Hotta
Ryoji Kosugi
Tetsuya Hirosawa