Title:
真空ポンプと真空ポンプの制御装置
Document Type and Number:
Japanese Patent JP7096006
Kind Code:
B2
Abstract:
To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump includes a pump main body and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket which has an inner surface and an outer surface in a vertical portion and in which a cooling medium flow passage is formed, and a plurality of electrical equipment that have circuit components and can be cooled by the cooling jacket. The inner surface and the outer surface are formed facing different directions, and the electrical equipment portions are attached respectively to the inner surface and the outer surface so that heat can be transferred.
Inventors:
Son Hikobuki
Application Number:
JP2018025853A
Publication Date:
July 05, 2022
Filing Date:
February 16, 2018
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F04B37/16; F04B39/00; F04B39/06
Domestic Patent References:
| JP2014043827A | ||||
| JP64002397A | ||||
| JP64005045A | ||||
| JP2013100760A | ||||
| JP2010079397A | ||||
| JP2015049443A | ||||
| JP7194139A | ||||
| JP2017153339A |
Foreign References:
| WO2011111209A1 | ||||
| DE102007028475A1 | ||||
| WO2012053271A1 |
Attorney, Agent or Firm:
Koji Mizuno
Keita Noguchi
Keita Noguchi
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