To provide a vacuum pump including the whole pressure range from the atmospheric air to the high vacuum and the ultra high vacuum range and having the simple structure that the pump is formed of one part and saving the location space at a low cost.

This vacuum pump is formed of plural pump units 14, 16, 18. At least one pump unit is formed of Gaede structure type molecular pump stages 16a connected in parallel with each other. In this case, this pump unit is formed of plural subordination units 16a, 16b, 16c formed of each Gaede pump stage 16c or Gaede pump stages 16a, 16b connected in parallel with each other. The pump unit 14 at a high vacuum side is formed as a turbo molecular pump, and the pump unit 18 facing to a side having a high pressure is formed as a side channel pump.