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Patent Searching and Data


Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2003232292
Kind Code:
A
Abstract:

To provide a vacuum pump capable of determining performance degradation and predicting the service life of the vacuum pump.

The rotating speed of a shaft 5 is detected by a rotating speed detecting function of a drive motor 7, and the lowered degree of the detected rotating speed from the predetermined set rotating speed is computed. An electric current flowing to the drive motor 7 is detected, and the increased degree of the detected electric current from the predetermined set current value is computed. The lowered quantity of the rotating speed and the increased quantity of the motor current are integrated and made a detection value. When the detection value exceeds the predetermined threshold value, the performance of a turbo molecular pump 20 is determined to be degraded, and an alarm is generated.


Inventors:
MAEJIMA YASUSHI
Application Number:
JP2002000031942
Publication Date:
August 22, 2003
Filing Date:
February 08, 2002
Export Citation:
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Assignee:
BOC TECHNOLOGIES LTD
International Classes:
F04D27/00; F04B49/10; F04D19/04; (IPC1-7): F04D19/04; F04B49/10; F04D27/00
Attorney, Agent or Firm:
椎名 正利