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Patent Searching and Data


Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2006090263
Kind Code:
A
Abstract:

To provide a vacuum pump of an atmospheric exhaust capable of obtaining a high vacuum condition in a short time irrespective of its low power consumption and compact size.

A turbo molecular pump part 2, a regeneration pump part 4, and a screw channel pump part 3 are arranged in this order, each rotor 5, 201, 401, 301 of these pump parts are directly connected with an output shaft 6A of a first driving motor 6 to rotate and drive each rotor, and a rotor 903 of a circumferential flow pump part 9 is directly connected with an output shaft 10A of a second driving motor 10 to rotate and drive it. In an exhaust passage, exhaust gas is exhausted to the atmosphere by passing through the turbo molecular pump part 2 of the vacuum pump from a vacuum chamber, the screw channel pump part 3, the regeneration pump part 4, and the circumferential flow pump part 9 in this order. When starting exhaust, the second driving motor 10 is first driven to operate the circumferential flow pump part 9, and the pressure in the turbo molecular pump part and the regeneration pump part is made a low vacuum condition. In this condition, the first driving motor 6 is started to start operation of the turbo molecular pump part and the regeneration pump part. Since the pressure in the molecular pump part and the regeneration pump part is reduced by far than atmospheric pressure, resistance is small, consumption power is small, a compact driving motor can be used for the first motor, and the amount of its heat generation is small.


Inventors:
Yamashita, Yoshihiro
Application Number:
JP2004000279541
Publication Date:
April 06, 2006
Filing Date:
September 27, 2004
Export Citation:
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Assignee:
BOC EDWARDS KK
International Classes:
F04D19/04; F04D23/00; F04D25/16; F04D29/58
Attorney, Agent or Firm:
和田 成則
茅原 裕二