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Patent Searching and Data


Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2006342791
Kind Code:
A
Abstract:

To provide a vacuum pump capable of rotating a high vacuum rotor without using a sub-pump or the like for roughing.

First rotary pump parts 3, 4 are provided with low vacuum rotors 301, 401 rotating in a pressure zone higher than a second rotary pump part 2 and performing exhaust action, the second rotary pump part 2 is provided with the high vacuum rotor 201 rotating in a pressure zone lower than the first rotary pump parts 3, 4 and performing exhaust action. A drive motor 7 rotates the low vacuum rotors 301 and 401. A magnet coupling 9 is provided with a drive side magnet body 9-1 and a driven side magnet body 9-2 arranged to make same poles face each other as a means magnetically coupling the low vacuum rotors 301, 401 and the high vacuum rotor 201 in a rotary direction. The drive side magnet body 9-1 is attached on the low vacuum rotors 301 and 401 and the driven side magnet body 9-2 is attached on the high vacuum rotor 201.


Inventors:
YAMASHITA YOSHIHIRO
TOKI NAGATAKE
Application Number:
JP2006019427A
Publication Date:
December 21, 2006
Filing Date:
January 27, 2006
Export Citation:
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Assignee:
BOC EDWARDS KK
International Classes:
F04D19/04; F04B37/08; F04D29/053; H02K7/00
Attorney, Agent or Firm:
Shigenori Wada
Yuji Chihara