To provide a vacuum pump capable of rotating a high vacuum rotor without using a sub-pump or the like for roughing.
First rotary pump parts 3, 4 are provided with low vacuum rotors 301, 401 rotating in a pressure zone higher than a second rotary pump part 2 and performing exhaust action, the second rotary pump part 2 is provided with the high vacuum rotor 201 rotating in a pressure zone lower than the first rotary pump parts 3, 4 and performing exhaust action. A drive motor 7 rotates the low vacuum rotors 301 and 401. A magnet coupling 9 is provided with a drive side magnet body 9-1 and a driven side magnet body 9-2 arranged to make same poles face each other as a means magnetically coupling the low vacuum rotors 301, 401 and the high vacuum rotor 201 in a rotary direction. The drive side magnet body 9-1 is attached on the low vacuum rotors 301 and 401 and the driven side magnet body 9-2 is attached on the high vacuum rotor 201.
TOKI NAGATAKE
Yuji Chihara
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