Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP2008504479
Kind Code:
A
Abstract:
A differentially pumped mass spectrometer system comprises a mass spectrometer having first and second pressure chambers through which, during use, ions are conveyed along a path. A pump assembly (10) for differentially evacuating the chambers (62,66,68) is attached to the mass spectrometer. The pump assembly (10) comprises a housing (12) attached to the mass spectrometer and a cartridge (14) inserted into the housing (12). The cartridge (14) has a plurality of inlets (16,18,20) each for receiving fluid from a respective pressure chamber (62,66,68) and a pumping mechanism (30,32,34) for differentially pumping fluid from the chambers. The cartridge (14) is inserted into the housing (12) such that the pumping mechanism (10) is inclined relative to the ion path (76), but with the cartridge (14) protruding into the mass spectrometer to such an extent that at least one of the inlets (16,18) at least partially protrudes into its respective chamber (62,68) without crossing the ion path (75).
Inventors:
Stuart Martin Nicholas
Goodwin David John
Olsen Ian
Goodwin David John
Olsen Ian
Application Number:
JP2007517437A
Publication Date:
February 14, 2008
Filing Date:
June 09, 2005
Export Citation:
Assignee:
The BOC Group plc
International Classes:
F04B37/16; F04D19/04; F04D29/60; G01M3/20; H01J49/26; G01N27/62
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato