To provide an improved vacuum pump in which at least one rotor shaft 12 has a rotor section 14 with a rotor 16, a bearing section 18 with a bearing 20, and a shaft sealing device 22 that is axially provided between the rotor and bearing sections 14 and 18, and in which the shaft sealing device includes a gas seal 32 at the axial direction rotor side and an oil seal 34 on the axial direction bearing side.
The shaft sealing device 22 provided between the gas seal 32 and oil seal 34 includes a separation chamber 36 which surrounds the rotor shaft 12 and is ventilated by one or more separation chamber-ventilating ducts 60 and 62. A blocking gas source is connected to the separation chamber-ventilating duct, and the blocking gas is introduced into the separation chamber 36 under excessive pressure through the separation chamber-ventilating duct.
GIEBMANNS WOLFGANG
GROSS HANS-ROCHUS
KRIEHN HARTMUT
| JPS63285279A | 1988-11-22 | |||
| JPS61104187A | 1986-05-22 | |||
| JPH1061671A | 1998-03-06 | |||
| JP2001207984A | 2001-08-03 |
| EP0874158A1 | 1998-10-28 | |||
| US6287100B1 | 2001-09-11 |
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard