Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2010265895
Kind Code:
A
Abstract:
To provide a vacuum pump in which a side-channel-pump stage has an improved vacuum characteristic value and simultaneously a shape with which pump active parts can be easily manufactured.
This vacuum pump includes a gas inlet, a gas outlet, and the side-channel-pump stage. The side-channel-pump stage includes an impeller provided with an outer circumference and at least one blade 402, and rotated. The blade includes a rear part 405 provided with an outer corner 408 positioned at rear in a motion direction 407. The blade includes a chamfer 406 at the outside corner of the rear part in order to improve vacuum characteristics with simple manufacturability.
COPYRIGHT: (C)2011,JPO&INPIT
Inventors:
SACHS RONALD
SHIRINOV ALEKSANDR
SHIRINOV ALEKSANDR
Application Number:
JP2010109860A
Publication Date:
November 25, 2010
Filing Date:
May 12, 2010
Export Citation:
Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F04D19/04; F04D23/00
Domestic Patent References:
| JPH029992A | 1990-01-12 | |||
| JPH06173880A | 1994-06-21 | |||
| JPH10196586A | 1998-07-31 | |||
| JPS61210294A | 1986-09-18 |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita