To solve the problem in which any performance change in a first chamber 11 is not preferable because it gives significant influence on performance of a separate chamber.
A differential pressure pump type mass spectrometer system includes a mass spectrometer with a plurality of pressure chambers, a vacuum pump provided in the mass spectrometer and having at least three pump inlets, a first pumping section, a second pumping section downstream of the first pumping section, and a third pumping section downstream of the second pumping section. An exit from the first chamber having a relatively lower pressure is linked to a first pump inlet. A fluid flows from the first chamber through the first pump inlet into a pump and can flow only through the first pumping section, the second pumping section, and the third pumping section to a pump outlet.
| JP2002242876 | MAGNETIC BEARING TYPE PUMP |
| WO/2023/100813 | VACUUM PUMP |
| JPH04127892 | [Title of the device] Vacuum pump |
SCHOFIELD NIGEL PAUL
STUART MARTIN NICHOLAS
| JPH06280785A | 1994-10-04 | |||
| JP2003129990A | 2003-05-08 |
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino