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Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2014084825
Kind Code:
A
Abstract:

To shorten the lengths of rotating shafts in a two-shaft vacuum pump provided with magnetic bearings.

A vacuum pump comprises: two rotating shafts that are arranged in parallel and synchronously rotate on two respective axes; and magnetic bearings that support the two rotating shafts at both ends of the respective rotating shafts. The magnetic bearings comprise: bearing rotors that have a cylindrical cup-like shape, include a magnetic material, and rotate together with the rotating shafts; first electromagnets that are arranged in parallel with the axes inside the bearing rotors; second electromagnets that are arranged perpendicularly to the axes inside the bearing rotors and generate magnetic attraction force in the direction of the axes at both ends of the rotating shafts.


Inventors:
OYAMA ATSUSHI
Application Number:
JP2012235633A
Publication Date:
May 12, 2014
Filing Date:
October 25, 2012
Export Citation:
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Assignee:
EBARA CORP
International Classes:
F04C25/02; F04C29/00; F16C32/04
Domestic Patent References:
JPS60116892A1985-06-24
JPH04175491A1992-06-23
JPS63225720A1988-09-20
JPH10299770A1998-11-10
Foreign References:
WO2010064588A12010-06-10
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yamazaki Kosaku
Yukio Kanegae
Koichi Kushida



 
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