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Patent Searching and Data


Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019132253
Kind Code:
A
Abstract:
To improve a service life by preventing an increase in temperature of a ball bearing in an integrated turbo molecular pump (vacuum pump) using the ball bearing.SOLUTION: A turbo molecular pump (vacuum pump) 1 comprises a rotor 3 in which a plurality of stages of rotor blades 30 are formed, a base 2 comprising a ball bearing 8 rotatably supporting the rotor 3, an outer cylinder 12 covering the rotor 3 and connected to the base 2, and a control device 100 including an electronic circuit including a heating element 103. The control device 100 is provided in contact with the outer cylinder 12.SELECTED DRAWING: Figure 1

Inventors:
SHIMIZU KOICHI
Application Number:
JP2018017243A
Publication Date:
August 08, 2019
Filing Date:
February 02, 2018
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
F04D19/04
Domestic Patent References:
JP2004084632A2004-03-18
JP2004183619A2004-07-02
JPH08338393A1996-12-24
JP2007032535A2007-02-08
Attorney, Agent or Firm:
Fuyuki Nagai