Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019214992
Kind Code:
A
Abstract:
To provide a vacuum pump capable of stably supplying a proper amount of lubricating fluid to a rolling bearing rotating at high speed under a vacuum environment.SOLUTION: A vacuum pump comprises: a bearing 8 that supports a shaft 10 provided with a pump rotor 3; a lubricating fluid storage part 60 in which lubricating fluid supplied to the bearing 8 is stored; a MEMS element 40 formed with a micro flow pump 401 for transferring the lubricating fluid of the lubricating fluid storage unit 60 to the bearing 8; and a suction pipe 61 that is a flow passage of a capillary structure that moves the lubricating fluid in the lubricating fluid storage unit 60 to the micro flow pump 401 by capillary force.SELECTED DRAWING: Figure 2
Inventors:
MANABE MASATSUGU
SAITO HIDEFUMI
SAITO HIDEFUMI
Application Number:
JP2018113743A
Publication Date:
December 19, 2019
Filing Date:
June 14, 2018
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04; F04B39/02; F04B51/00; F16C19/16; F16C19/52; F16C33/66; F16N7/38; F16N9/02; F16N13/00; F16N29/00; F16N29/04
Attorney, Agent or Firm:
Fuyuki Nagai