Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019218947
Kind Code:
A
Abstract:
To provide a vacuum pump capable of stably supplying an appropriate amount of lubrication fluid to a rolling bearing which rotates at a high speed under vacuum environment.SOLUTION: A vacuum pump comprises: a bearing 8 which supports a shaft 10 with a pump rotor 3 installed thereon; a lubrication fluid storing section 60 which stores lubrication fluid supplied to the bearing 8; a MEMS element 40 which has a micro flow rate pump 401 discharging droplets of lubrication fluid into a lubrication fluid circulation passage R at a side of a rotation shaft between the bearing 8 and the lubrication fluid storing section 60; and a suction pipe 61 which is a flow passage having a capillary structure for moving the lubrication fluid in the lubrication fluid storing section 60 to the micro flow rate pump 401 by capillary force.SELECTED DRAWING: Figure 2
Inventors:
MANABE MASATSUGU
SAITO HIDEFUMI
SAITO HIDEFUMI
Application Number:
JP2019082085A
Publication Date:
December 26, 2019
Filing Date:
April 23, 2019
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04; B81B3/00; F16C19/52; F16C33/66; F16N7/36; F16N7/38; F16N13/00; F16N13/22; F16N29/00; G01J5/00
Attorney, Agent or Firm:
Fuyuki Nagai
Morimoto Takuyuki
Morimoto Takuyuki