Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2022158145
Kind Code:
A
Abstract:
To eliminate a risk that a user contacts with a high temperature part of a vacuum pump.SOLUTION: A vacuum pump 1 includes: a rotor cylindrical part 25; a motor 28 which rotates the rotor cylindrical part 25; a stator cylindrical part 26 which forms a screw groove pump with the rotor cylindrical part 25; a base 4 which houses the rotor cylindrical part 25 and the stator cylindrical part 26; a heater 51 which heats a housing 3 or the stator cylindrical part 25; a cooling device 8 attached to the base 4; and a cover member 7 which is disposed at the outer periphery side of the stator cylindrical part 26 and the outer periphery side of the base 4, covers the base 4 through an air heat insulation layer S3, and contacts with the cooling device 8.SELECTED DRAWING: Figure 1
Inventors:
YASUDA TOMOKI
Application Number:
JP2021062845A
Publication Date:
October 17, 2022
Filing Date:
April 01, 2021
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04
Attorney, Agent or Firm:
Yamashita
Yasuhiro Kawabun
Yasuhiro Kawabun
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