真空ポンプ - International Science Foundation

Title:

真空ポンプ

Document Type and Number:

Japanese Patent JP4578780

Kind Code:

B2

Abstract:

A vacuum pump, comprising a pair of screw rotors having a first screw rotor with a plurality of spiral land parts and a second screw rotor with a plurality of spiral groove parts and rotating about two axes substantially parallel with each other while engagement with each other, a casing storing the pair of screw rotors, and a pair of bearings installed on a pair of shafts (4) supporting the pair of screw rotors. The vacuum pump is characterized in that a pair of shaft seals (5) in noncontact with the pair of shafts (4) are installed between the pair of screw rotors and the pair of bearings, and each of the pair of shaft seals (5) is of a static pressure type and leads seal gas through a shaft seal portion.

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Inventors:

Tadahiro Ohmi

Application Number:

JP2003055225A

Publication Date:

November 10, 2010

Filing Date:

March 03, 2003

Export Citation:

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Assignee:

International Science Foundation

International Classes:

F04C18/16; F04C27/00; F04C25/02; F16J15/40

Domestic Patent References:

JP11270482A
JP6015176Y2
JP2000213488A
JP2089812A
JP3048015A
JP7103236A

Attorney, Agent or Firm:

Kenho Ikeda
Shuichi Fukuda

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