Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP5135301
Kind Code:
B2
Abstract:
A vacuum pump ( 10 ) comprises at least one rotor shaft ( 12 ) having a rotor section ( 14 ) with a rotor ( 16 ), a bearing section ( 18 ) with a bearing ( 20 ), and a shaft sealing system ( 22 ) that is axially situated between the rotor section ( 14 ) and the bearing section ( 18 ). The shaft sealing system ( 22 ) axially comprises, on the side of the rotor, a gas seal ( 32 ) and, on the side of the bearing, an oil seal ( 34 ). The shaft sealing system ( 22 ) additionally comprises, between the gas seal ( 32 ) and the oil seal ( 34 ), a separating chamber, which surrounds the rotor shaft ( 12 ) and is ventilated by at least one separating chamber ventilation duct ( 60, 62 ). This enables the pressure difference that decreases via the gas seal and the pressure difference that decreases via the oil seal to be adjusted. An appropriate adjustment can prevent oil on the bearing side from passing through the oil seal toward the separating chamber.
Inventors:
Thomas dry felt
Wolfgang Geepmans
Hans-Loafs Growth
Haltmut Clean
Wolfgang Geepmans
Hans-Loafs Growth
Haltmut Clean
Application Number:
JP2009190920A
Publication Date:
February 06, 2013
Filing Date:
August 20, 2009
Export Citation:
Assignee:
Leybold Vakuum GmbH
International Classes:
F04C27/00; F04C25/02; F16J15/18; F04C27/02; F16J15/447
Domestic Patent References:
| JP63285279A | ||||
| JP61104187A | ||||
| JP10061671A | ||||
| JP2001207984A |
Attorney, Agent or Firm:
Toshio Yano
Takuya Kuno
Einzel Felix-Reinhard
Takuya Kuno
Einzel Felix-Reinhard