Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP5636042
Kind Code:
B2
Abstract:
A multi stage vacuum pump for pumping corrosive fluid with a first flow section of material less resistant to corrosion than the material of a second flow section downstream of the first flow section.
Inventors:
オコローフォー エマニュエル ウゾマ
Application Number:
JP2012507816A
Publication Date:
December 03, 2014
Filing Date:
March 31, 2010
Export Citation:
Assignee:
エドワーズ リミテッド
International Classes:
F04C25/02; F04B37/16; F04C23/00
Attorney, Agent or Firm:
辻居 Koichi
Sadao Kumakura
Pupil circle 健
Sari Ino
Matsushita 満
Ichiro Kurasawa
Kazushige Tanzawa
Sadao Kumakura
Pupil circle 健
Sari Ino
Matsushita 満
Ichiro Kurasawa
Kazushige Tanzawa