Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP5677202
Kind Code:
B2
Abstract:
A vacuum pump (10) includes a pump casing (56) having an inlet port (54a), an outlet port (54b), and pump chambers (50a-50f) defined therein, rotational shafts 60 having opposite ends rotatably supported by bearings (84a, 84b) on the pump casing (56) and extending longitudinally in the pump casing (56), and rotors (62a-62f) housed in the pump chambers (50a-50f) and coupled to the rotational shafts (60) for rotation in unison with the rotational shafts (60). The pump casing (56) has an atmosphere-vented compartment (52) defined therein which is held in fluid communication with the outlet port (54b) of the pump casing (56) and vented to the atmosphere.
Inventors:
百済 壮一
新村 恵弘
長山 真己
新村 恵弘
長山 真己
Application Number:
JP2011123980A
Publication Date:
February 25, 2015
Filing Date:
June 02, 2011
Export Citation:
Assignee:
株式会社荏原製作所
International Classes:
F04C25/02; F04C18/18; F04C23/00
Attorney, Agent or Firm:
Isamu Watanabe
Kosugi Ryoji
Tetsuya Hirozawa
Kosugi Ryoji
Tetsuya Hirozawa