真空ポンプ - Pfeiffer Vacuum Game Behr

Title:

真空ポンプ

Document Type and Number:

Japanese Patent JP5859041

Kind Code:

B2

Inventors:

Michael Sill

Application Number:

JP2014033888A

Publication Date:

February 10, 2016

Filing Date:

February 25, 2014

Export Citation:

Assignee:

Pfeiffer Vacuum Game Behr

International Classes:

F04D19/04

Domestic Patent References:

Attorney, Agent or Firm:

Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Kiyota Eisho

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