Vacuum pump - Edwards Co., Ltd.

Title:

Vacuum pump

Document Type and Number:

Japanese Patent JP6022635

Kind Code:

B2

Inventors:

Yoshinobu Otachi
Yasushi Maejima

Application Number:

JP2015085026A

Publication Date:

November 09, 2016

Filing Date:

April 17, 2015

Export Citation:

Assignee:

Edwards Co., Ltd.

International Classes:

F04D19/04

Domestic Patent References:

Attorney, Agent or Firm:

Masatoshi Shiina

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