Title:
Vacuum pump
Document Type and Number:
Japanese Patent JP6084962
Kind Code:
B2
Abstract:
A multi-stage vacuum pump may include first and second half-shell components defining a plurality of pumping chambers and for assembly together along respective longitudinal extending faces; first and second end stator components for assembly at respective longitudinal seals for sealing between the first and second half-shell stator components when assembled together at the longitudinally extending faces; and annular seals for sealing between the first and second end stator components and the first and second half-shell stator components when assembled; wherein the longitudinal seals have end portions which abut against the annular seals for sealing therebetween and the first and second half-shell stator components have formations for resisting movement of the end portions away from the annular seals when the end portions are compressed between the first and second half-shell stator components.
Inventors:
Turner Neil
Dowswell stephen
Kila Sam Shiva Balun
Holbrook Alan Ernest Kinnead
Dowswell stephen
Kila Sam Shiva Balun
Holbrook Alan Ernest Kinnead
Application Number:
JP2014500466A
Publication Date:
February 22, 2017
Filing Date:
January 17, 2012
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04C27/02
Domestic Patent References:
| JP2004507641A | ||||
| JP2006236611A | ||||
| JP2003016801A | ||||
| JP4153581A | ||||
| JP4100297A | ||||
| JP2010540832A |
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Yamamoto Kousuke
Disciple Maru Ken
Shinichiro Tanaka
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Yamamoto Kousuke