Title:
真空ポンプ
Document Type and Number:
Japanese Patent JP6445292
Kind Code:
B2
Inventors:
Koichi Iwasaki
Application Number:
JP2014195053A
Publication Date:
December 26, 2018
Filing Date:
September 25, 2014
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04B41/00; F04B37/16
Domestic Patent References:
| JP57188787A | ||||
| JP3176808U | ||||
| JP2013123940A | ||||
| JP2010155518A | ||||
| JP2004098890A | ||||
| JP2001350520A | ||||
| JP2001213591A | ||||
| JP2005069163A | ||||
| JP2007015512A | ||||
| JP2008175145A |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Makoto Watanabe
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Makoto Watanabe